BEVERLY, Mass., Oct. 19, 2010 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS) today announced that it has received a significant, multiple system order from one of the world's largest ...
BEVERLY, Mass., Dec. 16, 2010 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS) today announced that its Integra TM ES plasma dry strip system has been selected as the process tool of ...
Axcelis Technologies Inc. today introduced its FusionES3I, a second-generation 300mm plasma asher that allows chipmakers to handle copper, low-k dielectric, deep trench/via and other dry strip ...
BEVERLY, Mass. – Paving the way for next-generation devices down to the 45-nm node, Axcelis Technologies Inc. here today (May 27) rolled out a 300-mm dry strip tool for use in “damage-free” cleaning ...
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